Innovative Nanoimprint-Assisted Fabrication of Anodic Aluminum Oxide

  • Po-Chun Chen Department of Electrical Engineering, Texas A&M University, College Station, TX 77843-3128, USA;
  • Youwei Jiang Department of Electrical Engineering, Texas A&M University, College Station, TX 77843-3128, USA
  • Dawen Li Department of Electrical and Computer Engineering, University of Alamama, Tuscaloosa, AL 35487, USA
  • Jun Zou Department of Electrical Engineering, Texas A&M University, College Station, TX 77843-3128, USA
  • Xing Cheng Department of Material Science and Engineering, South University of Science and Technology of China, Shenzhen, Guangdong 518055, China
Keywords: Nanoimprint, controllable anodic aluminum oxide template

Abstract

Anodic aluminum oxide (AAO) templates possess highly-ordered nanoporous structures, with advantages such as high aspect ratio. However, there are limits to control the growth of the traditional AAO arrays, such as interpore distance, pore sizes and densities. In this study, we introduce an innovative nanoimprint process guided AAO fabrication to overcome these limitations of the traditional AAO arrays.

Published
2017-06-14
Section
ARTICLES